濺鍍耗材 Sputtering Spare

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矽 Silicon Si 濺鍍耗材 Sputtering Spare:

單晶矽/1-0-0 晶向/純度:99,9999%/P型 (B Dopant)/電阻率: 1-5 Ohm.cm; 0.001~0.015Ohm.cm/無滑移 (Slip Free, no Lineage)
產品通常為環狀, 如: Insert Ring/Focus Ring/Hot Edge Ring/Top Ring/Collar Ring/Cover Ring

濺鍍耗材形狀: Tube, 管/Ring, 環/Rod, 棒/ Plate, 板 / Customized,客製化.

石英 Quartz SiO2
濺鍍耗材 Sputtering Spare

Boron Nitride BN 氮化硼
濺鍍耗材 Sputtering Spare

矽 Silicon
濺鍍耗材 Sputtering Spare

氧化鋁 Aluminua 氧化鋯 Zirconia
濺鍍耗材 Sputtering Spare

鉭 Ta/鈮 Nb/鈦 Ti 金屬合金耐腐蝕,
濺鍍耗材 Sputtering Spare

鎢 W/ 鉬 Mo/金屬合金耐高溫
濺鍍耗材,Sputtering Spare

鎳鈦 NiTi/鎳 Ni /Stainless/Invar/Kovar 合金耗材
濺鍍耗材 Sputtering Spare

耐熱膠帶 High-Temp Protect Tape
濺鍍耗材,Sputtering Spare

濺鍍耗材 Sputtering Spare