
| Quartz Fused Wafer | Synthetic Quartz Wafer | ||
| Wafer Size | 1/2/3/4/6/8 inch | Wafer Size | 1/2/3/4/6/8 inch. |
| Substrate Size | 10 x 10 / 50 x 50 / 100 x 100 mm | Substrate Size | 10 x 10 / 50 x 50 / 100 x 100 mm |
|
Thickness
|
0.5 /1 /2 /3 mm | Thickness | 0.5 / 1 / 2 mm |
| Surface | SSP/DSP_Ra: no more than 15A | Surface | SSP/DSP |
| Flat | As SEMI. Standard/1 side | Angle cut | X/ Y / YX / Z cut_AT-cut 36° / ST cut 42.75° |
| Density | 2.2 g / cm3 | Grade | SAW / Optical |
| Therma1 Conductivity | 1.4 W / m °C | Growth method | Hydrothermal |
| Thermal Expansion | 5.5×10 -7 cm / cm °C | Crystal structure | Hexagonal |
| Resistivity | 7×10 *7 ohm-cm | Lattice constant | A=4.9 A , C=5.4 A |
| Impurity | 20 -40 ppm | Thermal Conductivity | 10.0033 cal / cm / °C |
| Density | 2.2 g / cm3 | Thermal expansion | 13.71 ×10 - 6 K-1 |